A Spine Layout Design Method For Semiconductor Fabrication Facilities Containing Automated Material Handling Systems
نویسندگان
چکیده
A bay configuration arranged along a central spine and served by an automated monorail material handling system are common designs for the layout and material handling system in new semiconductor wafer fabrication facilities. This paper investigates the facility design problem in semiconductor fabrication facilities and proposes a procedure to determine the optimal spine layout design given a design of the material handling system. The procedure is explained and tested to demonstrate the use of the model for solving semiconductor facility design problems. The procedure is applicable for the important semiconductor industry as well as in other facilities that use a central spine layout configuration.
منابع مشابه
Integrated Facility Layout And Material Handling System Design In Semiconductor Fabrication Facilities
Semiconductor manufacturing is an important component of the U.S. manufacturing industry. Most of today’s fabrication facilities and those being designed for the near future use a bay layout configuration and an overhead monorail system for moving material between bays. These material handling systems are usually designed with a spine or perimeter type of configuration. This paper investigates ...
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